Semiconductor robotic arms are crucial components of semiconductor equipment, typically consisting of a controller, driver, arm, and
ceramic end effector. They feature high cleanliness, stability, precision, efficiency, and reliability. Primarily used in the front-end processes of semiconductor manufacturing, they are employed for handling, transporting, and positioning semiconductor wafers.
Semiconductor robotic arms utilize a negative pressure suction method to pick up wafers. This involves using a suction cup principle to adhere the semiconductor wafer to quartz or ceramic fingers, and then moving the wafer through the extension, rotation, and lifting motions of the robotic arm.
"High speed" and "cleanliness" are core characteristics of semiconductor wafer handling equipment. To meet these requirements, the performance demands on the components used are extremely stringent. Since most processes are conducted in vacuum, high-temperature, and corrosive gas environments, the end effector used in the equipment must possess excellent physical properties, such as high mechanical strength, corrosion resistance, high-temperature resistance, wear resistance, high hardness, and insulation. Advanced ceramic materials perfectly meet these requirements.
Both (Al2O3) alumina ceramics and silicon carbide (SiC) ceramics offer dense structures, high hardness, and excellent wear resistance, as well as good thermal stability, mechanical strength, insulation at high temperatures, and corrosion resistance. These properties make them ideal for manufacturing ceramic endeffectors for semiconductor equipment. However, from an economic perspective, considering material price and processing difficulty, alumina ceramic endeffectors or handling arms offer better cost-effectiveness.
Key advantages of high-purity alumina for robotic arms include:
1) High strength and hardness: Semiconductor endeffectors generally use high-purity alumina; the purer the alumina, the higher its strength.
2) Good electrical insulation properties: Room temperature resistivity is 1015Ω·cm, and insulation strength is 15 kV/mm.
3) High melting point: With a melting point of 2050℃, alumina ceramics exhibit less thermal deformation during semiconductor heat treatment, reducing deformation of semiconductor components.
4) Excellent chemical stability: Alumina ceramics have stable chemical properties, and does not release contaminating particles, static charges, or metal ions, ensuring semiconductor components remain uncontaminated.
5) Mature processing technology and cost-effective: Alumina is currently the most common and widely used ceramic material. Compared to other ceramic materials, alumina ceramics are easier to obtain, relatively cheaper, and have more mature processing technology.
Generally, there are three main types of custom ceramic arms: alumina ceramic robotic arms, black ceramic robotic arms, and composite ceramic robotic arms. Black alumina helps absorb heat or provide better light-shielding properties, which is particularly important for certain light-sensitive operations in the semiconductor industry. In summary, these ceramic materials all possess high density, high hardness, and high wear resistance, as well as good heat resistance, excellent mechanical strength, good insulation even at high temperatures, and good corrosion resistance, making them excellent materials for manufacturing robotic arms for semiconductor equipment.
Mingrui Ceramic is a manufacturer specializing in the R&D, production, precision machining, and application solutions of advanced ceramic materials. It is one of the few Chinese companies with a full industrial chain for advanced precision ceramics. The ceramic robotic arms and end-effectors produced by Mingrui Ceramic are designed for high-performance semiconductor equipment and have earned widespread recognition from customers.
