Semiconductor Ceramics

Mingrui Ceramic is an industry-leading manufacturer in nonporous technical ceramics for wafer processing equipment, we continuously optimize and upgrade the manufacturing process of semiconductor ceramics to achieve better product quality and increase the durability of products: high alumina ceramic arm, robot end effector, ceramic wafer chuck, wafer handling & processing components, and customized products.

For detailed sizes and tolerance, please consult us directly.

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Ceramic Arms Overview

Due to the high precision and durability are required in manufacturing, the semiconductor industry uses advanced technical materials for the production of components.

Technical ceramic is the ideal choice because of its high wear resistance and chemical inertia, and it is able to be ultra-precise machined to achieve the required precision. The ceramic semiconductor components made of alumina ceramic allow you to get more superior part quality, and to deliver to your customer the highest quality semiconductor parts you can.

We are able to achieve industry-leading precision control levels: minimum tolerance of 0.001mm and minimum surface roughness of Ra 0.1μm. The Low-surface-contact minimize the risk of negatively affecting wafer geometry. Contact us for OEM.

Available Materials

※ Porous ceramics are not available for us, all of our ceramics are made of non-porous ceramic material

※ Alumina (Al2O3 Aluminium Oxide), purity: 95%, 96%, 97%, 98%, 99%, 99.5%, 99.7%, 99.9%, 99.99%

※ ZTA (Zirconia Toughened Alumina)

※ Zirconia (ZrO2, Zirconium Oxide) and YSZ (Yttria-stabilized Zirconia)

※ Silicon Nitride (Si3N4) and Silicon Carbide (SiC)

Ceramic componets offered by Mingrui Ceramic are produced by these advanced technical ceramic materials to meet your application requirements, a wide variety of forms including ceramic sheets, tubes, rods, and custom parts.

Not sure which material is suitable for your application? Check out by clicking above guides or simply contact us, we will happy to help out.

Ceramic Arms Characteristics

※ High abrasion-resistant

※ Excellent oxide and corrosion resistance

※ Low thermal expansion

※ High durability

※ High hardness and stiffness

※ Electrical insulation